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Project Abstract
For many applications it is necessary to handle (to grasp, adjust, transport, position, release, fix, etc.) objects with an accuracy in sub-micrometer ranges. The only solution is often the use of a
nanohandling station with powerful sensory support delivered by an SEM. Due to a higher resolution and a higher depth of focus of an SEM additional application fields can be opened up. A significant benefit is
expected for microsystem technology (MST), microassembly, nanotribology, material nanocharacterization, microbiology, medicine, pharmaceutics, microelectronics (probing of ICs), mechanical engineering and
high-precision positioning for diverse applications. Microassembly, nanotesting and functional and pharmaco genomics are the main application fields of the project.
The pre-conditions for using an SEM are high-precise, user-friendly nanomanipulation facilities
nanorobots integrated into the vacuum chamber of an SEM and equipped with application-specific end-effectors. A modular design of the robots should allow an easy conversion of the desktop station for different applications. More flexibility can be achieved by using semiautonomous nanorobots with self-moving platforms. Within the project, two robot platforms for coarse positioning, a semiautonomous one and a fixed one, will be developed. Both platforms will be able to bear the same manipulators and end-effectors, supporting the principle of modularity. As the sensor data delivered by an SEM is not sufficient, additional sensors - micro video cameras and tactile-/force sensors - are needed. Suitable solutions for gripper-integrated force microsensors are not available so far. For these reasons, the development of force microsensors for the SEM robots is one of the main objectives of the project.
Two operation modes are to implement: telemanipulation by using a haptic interface or automatic control. The possibilities of a virtual reality representation of the working environment will be
investigated. To sum up, the superior goal of this project is the development of flexible nanorobots for the sensor-based handling of microscopic objects in an SEM, with a positioning precision of up to a few
nanometres. The nanorobots developed have to allow an easy conversion for the use under a light microscope.
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